![]() ![]() ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). ![]() reassignment QUALCOMM MEMS TECHNOLOGIES, INC. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Priority claimed from US34359810P external-priority Application filed by Qualcomm MEMS Technologies Inc filed Critical Qualcomm MEMS Technologies Inc Priority to US12/930,229 priority Critical patent/US9021880B2/en Assigned to QUALCOMM MEMS TECHNOLOGIES, INC. Original Assignee Qualcomm MEMS Technologies Inc Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) ( en Inventor Philip Jason Stephanou Cenk Acar Ravindra Vaman Shenoy David William Burns Justin Phelps Black Kurt Edward Petersen Srinivasan Kodaganallur Ganapathi Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Active, expires Application number US12/930,229 Other languages English ( en) Google Patents Micromachined piezoelectric three-axis gyroscope and stacked lateral overlap transducer (slot) based three-axis accelerometerÄownload PDF Info Publication number US9021880B2 US9021880B2 US12/930,229 US93022910A US9021880B2 US 9021880 B2 US9021880 B2 US 9021880B2 US 93022910 A US93022910 A US 93022910A US 9021880 B2 US9021880 B2 US 9021880B2 Authority US United States Prior art keywords sense drive frame proof mass axis Prior art date Legal status (The legal status is an assumption and is not a legal conclusion. Google Patents US9021880B2 - Micromachined piezoelectric three-axis gyroscope and stacked lateral overlap transducer (slot) based three-axis accelerometer US9021880B2 - Micromachined piezoelectric three-axis gyroscope and stacked lateral overlap transducer (slot) based three-axis accelerometer
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